SMI (Silicon Microstructures, Inc.), a subsidiary of Elmos, recently launched the SM5211 and SM6221 fully digital, low-pressure MEMS sensors series. These sensors are designed for a wide range of pressure applications, from 0.8 to 2.0 psi (56 to 140 cm H2O). With an initial accuracy of better than 1% and a total output offset of less than 1% (after 1000 hours of HTOL testing), they offer exceptional stability and reliability. The AccuStableâ„¢ technology ensures long-term performance, making them ideal for critical applications where precision matters most.
The SM1221 and SM4221 models, which also feature this advanced technology, were introduced earlier this year. Only products that combine high precision with long-term stability can achieve such quality. The latest addition to the family, the SM7221, extends the pressure range down to as low as 0.15 psi, opening up new possibilities in low-pressure sensing.

This sensor series is specifically developed for medical devices such as ventilators, oxygenators, and fluid discharge systems, as well as industrial applications like airflow monitoring, barometers, and pressure switches. It's also suitable for automotive use, including fuel vapor detection. All products are manufactured under the highest industry standards, including ISO 9001 and ISO/TS 16949, ensuring top-quality performance and reliability.
SMI’s digital output sensors are engineered with an advanced pressure-temperature compensation range spanning from -20°C to +85°C. The compensated pressure range can be customized from 0.15 psi to 30 psi based on specific user needs. The I²C protocol is used for the digital interface, offering both vertical and horizontal port options for flexible integration.
These sensors come with dedicated ASIC microcontrollers for pressure and digital signal conditioning. They are packaged in JEDEC-standard SOIC-16 packages, available in tubular or tape-reel configurations for easy handling and storage.
As a subsidiary of the global Elmos Semiconductor Group, SMI specializes in custom ICs and sensors, providing proven solutions for the industrial and medical sectors. Certified under ISO/TS 16949:2009, SMI has over 25 years of experience in developing MEMS-based sensors for a broad range of markets. Their design, manufacturing, and quality control processes ensure the production of the most sensitive and compact MEMS sensors available today.
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